imec Institutional Repository Browsing {{ collection }} by Author "Kim, Insung"

Publication

28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV Lithography

Kim, Il Hwan

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Kim, Insung

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Park, Changmin

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Lee, Jsiun

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Ryu, Koungmin

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De Schepper, P.

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Doise, J.

Proceedings paper

2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090Q

Publication

Flare mitigation strategies in extreme ultraviolet lithography

Kim, Insung

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Myers, Alan

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Melvin, Lawrence

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Ward, Brian

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Lorusso, Gian

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Jonckheere, Rik

Journal article

2008, Microelectronic Engineering, (85) 5_6, p.738-743

Publication

Shadowing effect compensation

Lorusso, Gian

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Kim, Insung

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Baudemprez, Bart

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Myers, Alan

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Hermans, Jan

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Jonckheere, Rik

Oral presentation

2007, International EUVL Symposium

Publication

Systematic quantification of flare mitigation strategies

Myers, Alan

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Kim, Insung

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Proceedings paper

2007, International EUVL Symposium, 28/10/2007

Browsing by Author "Kim, Insung"