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Browsing by Author "Kim, Jenna"

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    Nanometer-scale SiGe lateral recess metrology in CFET structures using micro-spot X-ray fluorescence

    Kim, Jenna
    ;
    Bogdanowicz, Janusz  
    ;
    Mingardi, Andrea  
    ;
    Puttarame Gowda, Pallavi  
    ;
    Stiers, Karen  
    Proceedings paper
    2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139810Z

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