Browsing by Author "Kim, Jeon-Ho"
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Publication Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
;Kwon, Hak-Yong ;Kim, Jeon-Ho ;Kim, Young-Hoon ;Kim, Young-Jae ;Kim, Dae-YounChoi, Seung-WooProceedings paper2010, 10th International Conference on Atomic Layer Deposition - ALD, 20/06/2010