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Browsing by Author "Kim, Jeon-Ho"

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    Plasma enhanced atomic layer deposition of silicon oxide for through silicon via

    Kwon, Hak-Yong
    ;
    Kim, Jeon-Ho
    ;
    Kim, Young-Hoon
    ;
    Kim, Young-Jae
    ;
    Kim, Dae-Youn
    ;
    Choi, Seung-Woo
    Proceedings paper
    2010, 10th International Conference on Atomic Layer Deposition - ALD, 20/06/2010

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