Browsing by Author "Kim, Jihoon"
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Publication Improvement of EUV Contact Hole Pattern Rectification using Novel Directed Self-Assembly Materials
Proceedings paper2025, 2025 Conference on Novel Patterning Technologies, 2025-05-05, p.1Publication The role of guide stripe chemistry in block copolymer directed self assembly
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2014, p.94250W