Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kim, Taeho"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Photobase generator enabled pitch division: a progress report

    Gu, Xinyu
    ;
    Cho, Younjin
    ;
    Kawakami, Takanori
    ;
    Hagiwara, Yuji
    ;
    Rawlings, Brandon
    ;
    Mesch, Ryan
    Proceedings paper
    2011, Advances in Resist Materials and Processing Technology XXVIII, 27/02/2011, p.7972-14

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings