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Browsing by Author "Kim, Yeonuk"

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    The Intermixing Study of Cu/Ru Interface in Dual-damascene Scheme for Advanced Interconnect

    Noh, Sunyoung
    ;
    Kim, Yeonuk
    ;
    Park, Seongho  
    ;
    Varela Pedreira, Olalla  
    ;
    Buccheri, Nunzio  
    Proceedings paper
    2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02

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