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Browsing by Author "Kirby, K.J."

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    Advanced front-end processes for the 45nm CMOS technology node

    Collart, E.J.H.
    ;
    Felch, S.B.
    ;
    Graoui, H.
    ;
    Tallavarjula, S.
    ;
    Lindsay, Richard
    ;
    Pawlak, Bartek  
    Oral presentation
    2004, E-MRS Spring Meeting Symposium B: Materials Science Issues in Advanced CMOS Source-Drain Engineering

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