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Browsing by Author "Kirkwood, D.A."

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    Profile changes and self-sputtering during low energy ion implantation

    Vandervorst, Wilfried  
    ;
    Janssens, Tom
    ;
    Brijs, Bert
    ;
    Lindsay, Richard
    ;
    Collart, E.J.H.
    Proceedings paper
    2002, Silicon Front-End Junction Formation Technologies, 1/04/2002, p.C7.2

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