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    Effect of Thickness on the Optical Constants Determination of TiN Thin Films in the EUV/VUV Range

    Abbasirad, Najmeh
    ;
    Dutta, Jit
    ;
    Herrero, Analia F.
    ;
    Kroth, Udo
    ;
    Jarnagin, Nathan
    ;
    Kirschner, Hans
    Proceedings paper
    2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139811R

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