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    Influence of the top chamber window temperature on the STI etch process

    Shamiryan, Denis
    ;
    Danilkin, Evgeny
    ;
    Tinck, Stefan
    ;
    Klick, Michael
    ;
    Milenin, Alexey  
    Proceedings paper
    2010, China Semiconductor Technology International Conference - CSTIC, 18/03/2010, p.731-736

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