Browsing by Author "Klima, K."
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Publication Optimised diode analysis of electrical silicon substrate properties
Proceedings paper1997, Crystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing II, 31/08/1997, p.218-227Publication Optimized diode analysis of electrical silicon substrate properties
Journal article1998, Journal of the Electrochemical Society, (145) 6, p.2107-2112