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Browsing by Author "Kobauashi, K."

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    Influence of boron implantation dose on the mechanical stress in polycrystalline silicon films

    Nakabayashi, M.
    ;
    Ikegami, M.
    ;
    Ohyama, Hidenori
    ;
    Kobauashi, K.
    ;
    Yoneoka, M.
    ;
    Simoen, Eddy  
    Proceedings paper
    2000, 3rd International Conference Materials for Microelectronics, 16/10/2000, p.85-88

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