Browsing by Author "Kobayashi, Ippei"
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Publication Nanometer-deep junctions with high doping concentration for Ge SDEs using solid-source doping and flash lamp annealing
;Tanimura, Hideaki ;Fuse, Kazuhiko ;Yamada, Takahiro ;Aoyama, TakayukiKato, ShinichiProceedings paper2017-06, 17th International Workshop on Junction Technology - IWJT, 1/06/2017, p.15-18