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Browsing by Author "Kogel, M"

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    An alternative application of ToF-SIMS/in-situ AFM: controlled sample preparation for IC failure analysis

    Franquet, Alexis  
    ;
    Spampinato, Valentina  
    ;
    Khaled, Ahmad  
    ;
    Conard, Thierry  
    ;
    Brand, Sebastian
    Oral presentation
    2019, SIMS 22 - 22nd International Conference on Secondary Ion Mass Spectrometry

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