imec Institutional Repository Browsing {{ collection }} by Author "Kondo, S."

Publication

Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.

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de kruif, R.

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Fukugami, N.

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Kondo, S.

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Van Setten, E.

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Connolly, B.

Proceedings paper

2012, Photomask Technology, 10/09/2012, p.852206

Publication

Investigation of barrier and slurry effects on the galvanic corrosion of copper

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Kondo, S.

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Shamiryan, Denis

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Journal article

2002, Microelectronic Engineering, (64) 1_4, p.117-124

Publication

Narrow trench corrosion of copper damascene interconnects

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Kondo, S.

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Journal article

2002, Japanese Journal of Applied Physics. Part 1, (41) 12, p.7338-7344

Browsing by Author "Kondo, S."