Browsing by Author "Kondoh, E."

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Metal thin films etching in supercritical CO2 fluid

Nakamura, Y.
;
Watanabe, M.
;
Kondoh, E.
;
Baklanov, Mikhaïl
Meeting abstract
2015, 62nd Japan Society of Applied Physics Spring Meeting, 11/03/2015, p.11a-A29-2
Supercritical CO2 etching of metal thin films for magnetoresistive memory processing

Rasadujjaman, M
;
Nakamura, Y.
;
Watanabe, M.
;
Kondoh, E.
;
Baklanov, Mikhaïl
Meeting abstract
2015, 41st Micro and Nanoengineering Conference - MNE, 21/09/2015
Thermal etching of metal thin films using supercritical fluid

Watanabe, M.
;
Nakamura, Y.
;
Kondoh, E.
;
Baklanov, Mikhaïl
Meeting abstract
2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015