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Browsing by Author "Kostas, Adam"

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    Validation of immersion lithography OPC model accuracy

    Estroff, Andrew
    ;
    Bailey, George
    ;
    Kostas, Adam
    ;
    Vandenberghe, Geert  
    ;
    Hendrickx, Eric  
    Proceedings paper
    2005, 2nd International Symposium on Immersion Lithography, 12/09/2005

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