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Browsing by Author "Kota, Gowri P."

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    Sub-65nm etch challenges of high-k and metal gate materials

    Kota, Gowri P.
    ;
    Ramalingam, Shyam
    ;
    Lee, Steve
    ;
    Coenegrachts, Bart  
    ;
    Lee, Chris
    ;
    Beckx, Stephan  
    Proceedings paper
    2004, 26th International Symposium on Dry Process, 30/11/2004, p.133-138

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