Browsing by Author "Kovacs, F"
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Publication Modifications of porous low-k by plasma treatments and wet cleans
; ; ; ; Publication Post salicidation clean: selective removal of un-reacted NiPt towards NiPtSi(Ge)
Proceedings paper2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.327-334