Browsing by Author "Kovaev, A."
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Publication Ultra low-k dielectrics damage under VUV and EUV radiation
;Zyryanov, S. ;Braginsky, O. ;Kovaev, A. ;Lopaev, D. ;Mankelevich, Y. ;Rakhimova, T.Rakhimov, A.Meeting abstract2012, 65th Gaseous Electronics Conference, 22/10/2012, p.CT2.00005