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Browsing by Author "Kovaev, A."

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    Ultra low-k dielectrics damage under VUV and EUV radiation

    Zyryanov, S.
    ;
    Braginsky, O.
    ;
    Kovaev, A.
    ;
    Lopaev, D.
    ;
    Mankelevich, Y.
    ;
    Rakhimova, T.
    ;
    Rakhimov, A.
    Meeting abstract
    2012, 65th Gaseous Electronics Conference, 22/10/2012, p.CT2.00005

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