Browsing by Author "Krause, A."
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Publication Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2
;Schwalm, R. ;Binder, H. ;Fischer, T. ;Funhoff, D. ;Goethals, Mieke ;Grassmann, A.Moritz, H.Proceedings paper1994, Advances in Resist Technology and Processing XI, 27/02/1994, p.2-13