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Browsing by Author "Krause-Rehberg, R"

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    Characterization of porous low-k dielectric films by using positron annihilation

    Uedono, Akira
    ;
    Armini, Silvia  
    ;
    Krause-Rehberg, R
    ;
    Wagner, A
    Meeting abstract
    2018, JAPAN-RUB Workshop on Plasma Science, 4/07/2018

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