Browsing by Author "Kruv, Anastaiia"
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Publication Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processes
; ; ; ; Journal article2017, Semiconductor Science and Technology, (32) 11, p.114006Publication Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processes
Proceedings paper2017, 10th International Conference on Silicon Epitaxy and Heterostructures - ICSI-10, 14/05/2017