Browsing by Author "Krzeminski, Christophe"
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Publication Anisotropic vapor HF etching of silicon dioxide for Si microstructure release
;Passi, Vikram ;Sodervall, Ulf ;Nilsson, Bengt ;Petersson, BengtHagberg, MatsJournal article2012, Microelectronic Engineering, 95, p.83-89