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Browsing by Author "Kuchler, Bernd"

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    Experimental characterization of NTD rResist shrinkage

    Kuchler, Bernd
    ;
    Mulders, Thomas
    ;
    Taoka, Hironobu
    ;
    Gao, Weimin  
    ;
    Klostermann, Ulrich
    Proceedings paper
    2017, Optical Microlithography XXX, 26/02/2017, p.101470F

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