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Browsing by Author "Kudryavtsev, V.V."

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    Pore sealing of SiOCH ultra low-k dielectrics with polyimide Langmuir-Blodgett film

    Goloudina, S.I.
    ;
    Ivanov, A.S.
    ;
    Krishtab, M.B.
    ;
    Luchinin, V.V.
    ;
    Pasyuta, V.M.
    ;
    Gofman, I.V.
    Proceedings paper
    2012, Interconnect Challenges for CMOS Technology - Materials, Processes and Reliability for Downscaling, Packaging and 3D Stacking, 9/04/2012, p.mrss12-1428-c02-

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