Browsing by Author "Kummel, Andrew"
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Publication Effect of Thickness on the Optical Constants Determination of TiN Thin Films in the EUV/VUV Range
;Abbasirad, Najmeh ;Dutta, Jit ;Herrero, Analia F. ;Kroth, Udo ;Jarnagin, NathanKirschner, HansProceedings paper2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139811RPublication Multi-domain Phase-field Modeling of Polycrystalline Hafnia-based (Anti-)ferroelectrics Capable of Representing Defects, Wake-up and Fatigue
Proceedings paper2022, International Electron Devices Meeting (IEDM), DEC 03-07, 2022