Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kuppuswamy, V.K.M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Challenges in LER/CDU metrology in DSA: placement error and cross-line correlations

    Constantoudis, Vassilios
    ;
    Kuppuswamy, V.K.M.
    ;
    Gogolides, Evangelos
    ;
    Vaglio Pret, Alessandro  
    Proceedings paper
    2016, Metrology, Inspection, and Process Control for Microlithography XXX, 20/02/2016, p.97781X

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings