Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kuppuswamy, Vijaya Kumar Murugesan"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Contact edge roughness: effects of dose and PAG concentration in EUV lithography

    Kuppuswamy, Vijaya Kumar Murugesan
    ;
    Constantoudis, Vassilios
    ;
    Gogolides, Evangelos
    Oral presentation
    2011, 37th International Conference on Micro and Nano Engineering - MNE

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings