Browsing by Author "Kuppuswamy, Vijaya Kumar Murugesan"
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Publication Contact edge roughness: effects of dose and PAG concentration in EUV lithography
;Kuppuswamy, Vijaya Kumar Murugesan ;Constantoudis, VassiliosGogolides, EvangelosOral presentation2011, 37th International Conference on Micro and Nano Engineering - MNE