Browsing by Author "Kurchikov, D."
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Publication Low-k OSG damage and etching by F atoms at lowered temperatures
;Zyryanov, S. ;Kurchikov, D. ;Lopaev, D. ;Mankelevich, Y. ;Palov, A. ;Rakhimova, T.Voronina, E.Oral presentation2015, 22nd International Symposium on Plasma Chemistry - ISPC