Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kurchikov, D."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Low-k OSG damage and etching by F atoms at lowered temperatures

    Zyryanov, S.
    ;
    Kurchikov, D.
    ;
    Lopaev, D.
    ;
    Mankelevich, Y.
    ;
    Palov, A.
    ;
    Rakhimova, T.
    ;
    Voronina, E.
    Oral presentation
    2015, 22nd International Symposium on Plasma Chemistry - ISPC

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings