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Browsing by Author "Kuznetsov, Vladimir"

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    The effect of ramp rate - short process time and partial reactions on Cobalt and Nickel silicide formation

    Pagès, Xavier
    ;
    Van der Jeugd, Kees  
    ;
    Kuznetsov, Vladimir
    ;
    Granneman, Ernst
    ;
    Lauwers, Anne  
    Proceedings paper
    2004, Advanced Short-Time Thermal Processing for Si-Based CMOS Devices II, 9/05/2004, p.174-182

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