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Browsing by Author "Labat, J."

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    Variation in process conditions of porogen-based low-k films: A method to improve performance without changing existing process steps in a sub-100 nm Cu damascene integration route

    De Roest, David  
    ;
    Travaly, Youssef
    ;
    Beynet, J.
    ;
    Sprey, Hessel  
    ;
    Labat, J.
    ;
    Huffman, Craig
    Journal article
    2010, Microelectronic Engineering, (87) 3, p.311-315

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