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Browsing by Author "Labat, Julianne"

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    Variation in process conditions of porogen-based low-k films: a method to improve performance without changing existing process steps in a sub-100nm Cu damascene integration route

    De Roest, David  
    ;
    Travaly, Youssef
    ;
    Beynet, Julien
    ;
    Sprey, Hessel  
    ;
    Labat, Julianne
    ;
    Huffman, Craig
    Meeting abstract
    2009, 18th Workshop Materials for Advanced Metallization - MAM, 8/03/2009

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