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Browsing by Author "Lacave, Thomas"

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    Backside analysis of ultra-thin film stacks in microelectronics technology using X-ray photoelectron spectroscopy

    Hantschel, Thomas  
    ;
    Demeulemeester, Cindy
    ;
    Suderie, Arnaud
    ;
    Lacave, Thomas
    ;
    Conard, Thierry  
    Proceedings paper
    2009, Electron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials, 13/04/2009, p.HH08-04

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