Browsing by Author "Lalovic, Ivan"
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Publication Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Impact of finite laser bandwidth on the critical dimension of L/S structures
Journal article2008, Journal of Micro/Nanolithography, MEMS, and MOEMS, (7) 3, p.33001Publication Improving on-wafer CD correlation analysis using advanced diagnostics and across-wafer light-source monitoring
Proceedings paper2014, Optical Microlithography XXVII, 23/02/2014, p.905228Publication Lithography imaging control by enhanced monitoring of light source performance
Proceedings paper2013, Optical Microlithography XXVI, 24/02/2013, p.86830SPublication Modeling laser bandwidth for OPC applications
Proceedings paper2009, Optical Microlithography XXII, 22/02/2009, p.72741O