Browsing by Author "Lan, Yongqing"
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Publication CMP Slurries for germanium substrates in FEOL applications
Meeting abstract2013, International Conference on Planarization/CMP Technology, 30/10/2013Publication Ge, III/V Materials CMP
Oral presentation2012, CAMP's 17th International Symposium on Chemical-Mechanical PlanarizationPublication III-V CMP process development
Proceedings paper2013, International Conference on Planarization/CMP Technology, 30/10/2013Publication III/V CMP process development
Proceedings paper2013, International Conference on Planarization/CMP Technology, 30/10/2013