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Browsing by Author "Larsen, Esben W."

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    Impact of vacuum ultraviolet photons on ultrathin negative tone resists for extreme ultraviolet lithography during plasma etching (vol 43, 023007, 2025)

    Arvind, Shikhar  
    ;
    Fallica, Roberto  
    ;
    Bezard, Philippe  
    ;
    Petersen, John  
    ;
    De Gendt, Stefan  
    Journal article correction
    2025-MAY

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