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Browsing by Author "Law, M.E."

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    Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations

    Camillo-Castillo, Renata
    ;
    Law, M.E.
    ;
    Lindsay, Richard
    ;
    Maex, Karen  
    ;
    Pawlak, Bartek  
    ;
    McCoy, S.
    Oral presentation
    2005, 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors

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