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    Complementary dipole exposure solutions at 0.29k1

    Hendrickx, Eric  
    ;
    Torres, Andres
    ;
    Lafferty, Neal
    ;
    Le Cam, Laurent
    ;
    Johnson, Stephen
    ;
    Reita, Carlo
    Proceedings paper
    2005, Optical Microlithography XVIII, 27/02/2005, p.327-338

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