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Browsing by Author "Lee, Chung Sun"

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    Permanent wafer bonding in the low temperature by using various plasma enhanced chemical vapour deposition dielectrics

    Kim, Soon-Wook  
    ;
    Peng, Lan  
    ;
    Miller, Andy  
    ;
    Beyer, Gerald  
    ;
    Beyne, Eric  
    ;
    Lee, Chung Sun
    Proceedings paper
    2015, IEEE International 3D Systems Integration Conference -3DIC, 31/08/2015, p.TS7.2

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