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Browsing by Author "Lee, F."

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    Atomic layer deposition: an enabling technology for microelectronic device manufacturing

    Lee, F.
    ;
    Marcus, S.
    ;
    Shero, E.
    ;
    Wilk, G.
    ;
    Swerts, Johan  
    ;
    Maes, Jan  
    ;
    Blomberg, T.
    ;
    Delabie, Annelies  
    Proceedings paper
    2007, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 11/06/2007, p.359-365

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