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Browsing by Author "Lee, Hsiang-Yun"

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    Study of ion and VUV effects on self-assembled organic low-k material exposed to argon plasma

    de Marneffe, Jean-Francois  
    ;
    Ljazouli, Rami
    ;
    Souriau, Laurent  
    ;
    Zhang, Liping  
    ;
    Lee, Hsiang-Yun
    Meeting abstract
    2012, MRS Spring Meeting Symposium C: Interconnect Challenges for CMOS Technology, 9/04/2012, p.C2.9

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