Browsing by Author "Lee, Jsiun"
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Publication 28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV Lithography
;Kim, Il Hwan ;Kim, Insung ;Park, Changmin ;Lee, Jsiun ;Ryu, Koungmin ;De Schepper, P.Doise, J.Proceedings paper2021, Conference on Extreme Ultraviolet (EUV) Lithography XII, FEB 22-26, 2021, p.116090Q