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Browsing by Author "Lee, Kilyoung"

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    Staggered pillar patterning using 0.33NA EUV lithography

    De Simone, Danilo  
    ;
    Blanc, Romuald  
    ;
    Van de Kerkhove, Jeroen  
    ;
    Tamaddon, Amir-Hossein  
    Proceedings paper
    2019, Extreme Ultraviolet (EUV) Lithography X, 25/02/2019, p.109570T-1-109570T-10

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