Browsing by Author "Lee, Kuntack"
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Publication Advanced wafer surface cleaning technology
Oral presentation2004, SEMICON Korea 2004 STS, S5: Contamination-free Manufacturing SeminarPublication Cleaning of nanoparticles in semiconductor manufacturing
Oral presentation2004, BePCIS Seminar on Selected Topics in NanotechnologyPublication Megasonics: a cavitation driven process
Oral presentation2004, 7th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Megasonics: a cavitation driven process
Proceedings paper2005, Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium, 20/09/2004, p.159-162Publication State-of-the art cleaning in semiconductor manufacturing
Oral presentation2003, 3rd International Workshop on New Trends in Laser Cleaning