Browsing by Author "Lee, S."
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Publication Al speed fill
Journal article1999, Materials Science in Semiconductor Processing, (2) 1, p.75-78Publication Ge deep sub-micron pFETs with etched TaN metal gate on a High-K dielectric, fabricated in a 200mm silicon prototyping line
Proceedings paper2004, Proceedings of the 34th European Solid-State Device Research Conference - ESSDERC, 21/09/2004, p.189-192Publication Germanium deep-sub micron PMOS transistors with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm prototyping line
Proceedings paper2004, SiGe: Materials, Processing, and Devices. Proceedings of the 1st International Sympsoium, 3/10/2004, p.693-700Publication Innovative characterization techniques for ultra-scaled FinFETs
Proceedings paper2010, 10th IEEE International Conference on Nanotechnology and Joint Symposium with Nano Korea, 17/08/2010, p.25-30Publication Integrating high-k dielectrics: etched polysilicon or metal gates?
Journal article2003, Solid State Technology, (46) 6, p.61-64Publication Sub-threshold study of undoped trigate nFinFET
Publication TaN metal gate MOSFETs with agressively scaled HfO2 dielectrics
Proceedings paper2003, Advanced Short-Time Thermal Processing for Si-based CMOS devices, 27/04/2003, p.367-374