Browsing by Author "Lee, Woongkyu"
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Publication Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes
;Han, Jeong Hwan ;Lee, Sang Woon ;Choi, Byung Joon ;Eom, Taeyong ;Kim, Seong KeunSong, Seul JiJournal article2013, Coordination Chemistry Reviews, (257) 23_24, p.3154-3176