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Browsing by Author "Leitao, Sofia"

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    Benefits of using advanced sub-resolution features for 0.55NA brightfield imaging

    Dhagat, Parul
    ;
    Leitao, Sofia
    ;
    Torres, Nadia Daniela Rivera
    ;
    Schiffelers, Guido
    ;
    Rio, David  
    Proceedings paper
    2024, 2024 International Conference on Extreme Ultraviolet Lithography, 2024-09-29

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