Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Leunissen, Leonardus A.H."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Improving defectivity for III-V CMP processes for <10 nm technology nodes

    Teugels, Lieve  
    ;
    Ong, Patrick  
    ;
    Boccardi, Guillaume  
    ;
    Waldron, Niamh  
    ;
    Usman Ibrahim, Ansar  
    Proceedings paper
    2014, International Conference on Planarization/CMP Technology, 19/11/2014

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings