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Browsing by Author "Leunissen, Leonardus H. A."

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    CMP on SiGe materials – linking chemical and physical properties to design low defect and selective slurries

    Ong, Patrick  
    ;
    Siebert, Max
    ;
    Leunissen, Leonardus H. A.
    ;
    Ibrahim, Sheikh Ansar Usman
    Proceedings paper
    2014, International Conference on Planarization Technology - ICPT, 19/11/2014

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